Research Catalog
Plasma electronics : applications in microelectronic device fabrication
- Title
- Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović.
- Author
- Makabe, T. (Toshiaki)
- Publication
- New York : Taylor & Francis, 2006.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TA2020 .M35 2006 | Off-site |
Details
- Additional Authors
- Petrović, Z
- Description
- 339 p. : ill.; 25 cm.
- Series Statement
- Series in plasma physics
- Subject
- Plasma engineering
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0750309768
- LCCN
- 2005056888
- 9780750309769
- OCLC
- ocm62290646
- SCSB-14992332
- Owning Institutions
- Princeton University Library