Research Catalog

Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Title
Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Author
National Research Council (U.S.). Panel on Plasma Processing of Materials
Publication
Washington, DC : National Academy Press, 1991.

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StatusFormatAccessCall NumberItem Location
TextUse in library TA2020 .N37 1991Off-site

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Details

Additional Authors
Proud, Joseph M
Description
xii, 75 p. : ill.; 28 cm.
Subject
Plasma engineering
Note
  • Panel chairman: Joseph Proud.
  • Project supported by the National Science Foundation, the Office of Naval Research, Defense Advanced Research Projects Agency, and the Air Force Office of Scientific Research.
Processing Action (note)
  • committed to retain
ISBN
0309045975
LCCN
^^^91066812^
Owning Institutions
Harvard Library