Research Catalog

Low pressure plasmas and microstructuring technology

Title
Low pressure plasmas and microstructuring technology / by Gerhard Franz.
Author
Franz, Gerhard, Dr. rer. nat
Publication
Berlin ; New York : Springer, [2009], ©2009.

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Details

Description
xxiv, 732 pages : illustrations; 24 cm
Subject
  • Plasma (Ionized gases) > Industrial applications
  • Plasma engineering
  • Plasma etching
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 9783540858485 (hbk.)
  • 3540858482 (hbk.)
LCCN
40016823819
OCLC
  • ocn277069476
  • 277069476
  • SCSB-5481860
Owning Institutions
Columbia University Libraries