Research Catalog
Plasma electronics : applications in microelectronic device fabrication
- Title
- Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović.
- Author
- Makabe, T. (Toshiaki)
- Publication
- New York : Taylor & Francis, 2006.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Book/Text | Request in advance | TA2020 .M35 2006 | Off-site |
Holdings
Details
- Additional Authors
- Petrović, Z
- Series Statement
- Series in plasma physics
- Uniform Title
- Series in plasma physics.
- Subject
- Plasma engineering
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- 1. Introduction -- 2. Phenomenological description of the charged particle transport -- 3. Macroscopic plasma characteristics -- 4. Elemental processes in gas phase and on surfaces -- 5. The Boltzmann equation and transport equations of charged particles -- 6. General properties of charged particle transport in gases -- 7. Modeling of nonequilibrium (low-temperature) plasmas -- 8. Numerical procedure of modeling -- 9. Capacitively coupled plasma -- 10. Inductively coupled plasma -- 11. Magnetically enhanced plasma -- 12. Plasma processing and related topics.
- ISBN
- 0750309768
- LCCN
- 2005056888
- OCLC
- OCM62290646
- SCSB-5245002
- Owning Institutions
- Columbia University Libraries