Research Catalog

Lecture notes on principles of plasma processing

Title: Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.
Author: Chen, Francis F., 1929-
Publication: New York : Kluwer Academic/Plenum Publishers, 2003.

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Item details
Status	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Book/text	Request in advance	JSF 03-898 [Text]	Offsite
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Book/text	Request in advance	*WSC-3357	Offsite

Additional Authors

Chang, Jane P., 1970-

Description

ix, 208 p. : ill.; 28 cm.

Alternative Title

Principles of plasma processing

Subject

Call Number

JSF 03-898

ISBN

0306474972

LCCN

2002040665

OCLC

50948445

Author

Chen, Francis F., 1929-

Title

Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.

Imprint

New York : Kluwer Academic/Plenum Publishers, 2003.

Added Author

Chang, Jane P., 1970-

Research Call Number

JSF 03-898 [Text]

*WSC-3357 [CD-ROM]