Research Catalog
The physics of microfabrication
- Title
- The physics of microfabrication / Ivor Brodie and Julius J. Muray.
- Author
- Brodie, Ivor
- Publication
- New York : Plenum Press, c1982.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Book/text | Request in advance | JSD 82-348 | Offsite |
Details
- Additional Authors
- Muray, Julius J.
- Description
- xix, 503 p. : ill.; 24 cm.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- Call Number
- JSD 82-348
- ISBN
- 0306408635
- LCCN
- 82003835
- OCLC
- 8282885
- NYPG83-B15764
- Author
- Brodie, Ivor.
- Title
- The physics of microfabrication / Ivor Brodie and Julius J. Muray.
- Imprint
- New York : Plenum Press, c1982.
- Bibliography
- Includes bibliographical references and index.
- Added Author
- Muray, Julius J.
- Research Call Number
- JSD 82-348