Research Catalog
Silicon nitride for microelectronic applications
- Title
- Silicon nitride for microelectronic applications [by] John T. Milek.
- Author
- Milek, John T. (John Theophil), 1915-
- Publication
- New York, IFI/Plenum, 1971-
Items in the Library & Off-site
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2 Items
| Status | Vol/Date | Format | Access | Call Number | Item Location |
|---|---|---|---|---|---|
| v. 9 | Book/text | Request in advance | JSK 75-398 | Offsite | |
| v. 1 | Book/text | Request in advance | JSK 75-398 | Offsite |
Details
- Description
- 2 v. illus.; 28 cm.
- Series Statement
- Handbook of electronic materials, v. 3, 6
- Subject
- Bibliography (note)
- Includes bibliographies.
- Contents
- - pt. 1. Preparation and properties. pt. 2. Applications and devices.
- Call Number
- JSK 75-398
- LCCN
- 77023589
- OCLC
- NYPG720052961-B
- Author
- Milek, John T. (John Theophil), 1915-
- Title
- Silicon nitride for microelectronic applications [by] John T. Milek.
- Imprint
- New York, IFI/Plenum, 1971-
- Series
- Handbook of electronic materials, v. 3, 6
- Bibliography
- Includes bibliographies.
- Research Call Number
- JSK 75-398