Research Catalog

Silicon nitride for microelectronic applications

Title
Silicon nitride for microelectronic applications [by] John T. Milek.
Author
Milek, John T. (John Theophil), 1915-
Publication
New York, IFI/Plenum, 1971-

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StatusVol/DateFormatAccessCall NumberItem Location
v. 9Book/textRequest in advance JSK 75-398Offsite
v. 1Book/textRequest in advance JSK 75-398Offsite

Details

Description
2 v. illus.; 28 cm.
Series Statement
Handbook of electronic materials, v. 3, 6
Subject
  • Silicon nitride
  • Microelectronics
  • Dielectrics
Bibliography (note)
  • Includes bibliographies.
Contents
- pt. 1. Preparation and properties. pt. 2. Applications and devices.
Call Number
JSK 75-398
LCCN
77023589
OCLC
NYPG720052961-B
Author
Milek, John T. (John Theophil), 1915-
Title
Silicon nitride for microelectronic applications [by] John T. Milek.
Imprint
New York, IFI/Plenum, 1971-
Series
Handbook of electronic materials, v. 3, 6
Bibliography
Includes bibliographies.
Research Call Number
JSK 75-398
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